An Investigation of Discontinious Specular Surfaces Using Non-contact In-Line Monitoring Techniques

Kiryl Kekukh, W. Doherty
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Abstract

An existing surface metrology algorithm, based on digital fringe projection, has been applied to measure specular discontinuous surfaces. Using in-house developed software, phase maps are measured by phase-stepping interferometry. Temporal Phase Unwrapping method is then used to perform unwrapping, leading to obtaining slope at every point on the reconstructed surface.
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用非接触式在线监测技术研究非连续镜面
现有的一种基于数字条纹投影的曲面测量算法已被应用于镜面不连续曲面的测量。使用内部开发的软件,相位图通过相位步进干涉测量测量。然后采用时间相位解包裹法进行解包裹,得到重构表面上每一点的斜率。
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