Nano-precision force and displacement measurements using MEMS resonant structures

Abstract

This work presents a new approach for measuring sub-nano-Newton forces and sub-picometer displacements using MEMS resonators. Different versions of thermally actuated dual plate micromechanical resonators coupled to electrostatic actuators are utilized as highly sensitive force/displacement sensors. The force generated by the actuator strains the associated resonator changing its resonant frequency. Upon thorough characterization, this approach can be used as a reliable and accurate solution for force and displacement measurements in micro and nano-electromechancial systems. Frequency-force and displacement sensitivities as high as 17Hz/nN and 540 Hz/pm have been measured for the presented structures, respectively, showing the potential of such devices for sub-nanoscale force and displacement measurement resolutions.