{"title":"The role of sampling errors in the specification and testing of EUV mirror surfaces","authors":"E. Church, P. Takacs","doi":"10.1364/oft.1996.owf.4","DOIUrl":null,"url":null,"abstract":"There are two sides to the bright coin of mirror quality: One is specification -- the determination of acceptable level of errors in the shape and finish of the mirror surface -- and the second is testing -- the procedure for measuring those errors to ensure compliance with the specifications.","PeriodicalId":354934,"journal":{"name":"Optical Fabrication and Testing","volume":"79 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Fabrication and Testing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/oft.1996.owf.4","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
There are two sides to the bright coin of mirror quality: One is specification -- the determination of acceptable level of errors in the shape and finish of the mirror surface -- and the second is testing -- the procedure for measuring those errors to ensure compliance with the specifications.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
