M. Marconi, L. Urbanski, P. Wachulak, A. Isoyan, F. Jiang, Y. Cheng, J. Rocca, C. Menoni, F. Cerrina
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引用次数: 0
Abstract
We present results with different nanopatterning techniques using table top extreme ultraviolet lasers. The three approaches are interferometric lithography, Talbot self imaging and holographic projection lithography.
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