В. Р. Шаяпов, М. Н. Чагин, А. Н. Колодин, М. Л. Косинова
{"title":"Осаждение пленок из смеси паров гексаметилциклотрисилазана и аргона в индуктивно-связанной плазме","authors":"В. Р. Шаяпов, М. Н. Чагин, А. Н. Колодин, М. Л. Косинова","doi":"10.1134/s0132665119060180","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":296440,"journal":{"name":"Физика и химия стекла","volume":"349 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Физика и химия стекла","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1134/s0132665119060180","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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