S. Guerber, D. Fowler, J. Faugier-Tovar, P. Grosse, J. Meilhan, Kim Abdoul Karim, J. Hue, B. Delplanque, F. Simoens, Bertand Szelag
{"title":"Wafer level characterization of high channel count Optical Phased Array","authors":"S. Guerber, D. Fowler, J. Faugier-Tovar, P. Grosse, J. Meilhan, Kim Abdoul Karim, J. Hue, B. Delplanque, F. Simoens, Bertand Szelag","doi":"10.1109/GFP51802.2021.9674016","DOIUrl":null,"url":null,"abstract":"We report on the characterization of a high channel count Optical Phased Array (OPA) at the wafer level. Using a modified prober, a 256 channel OPA has been successfully calibrated for +/-25° without requiring any packaging steps thus allowing for fast OPA testing.","PeriodicalId":158770,"journal":{"name":"2021 IEEE 17th International Conference on Group IV Photonics (GFP)","volume":"47 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 IEEE 17th International Conference on Group IV Photonics (GFP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/GFP51802.2021.9674016","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
We report on the characterization of a high channel count Optical Phased Array (OPA) at the wafer level. Using a modified prober, a 256 channel OPA has been successfully calibrated for +/-25° without requiring any packaging steps thus allowing for fast OPA testing.