G. Duan, C. Cuisin, E. Derouin, O. Drisse, L. Legouezigou, O. LeGouezigou, F. Pommereau, Y. Gottesman, E. Rao, B. Wild, R. Houdré
{"title":"Fabrication and characterization of low loss photonic crystal waveguides based on InP substrate","authors":"G. Duan, C. Cuisin, E. Derouin, O. Drisse, L. Legouezigou, O. LeGouezigou, F. Pommereau, Y. Gottesman, E. Rao, B. Wild, R. Houdré","doi":"10.1109/OFC.2005.192520","DOIUrl":null,"url":null,"abstract":"Photonic crystal waveguides, fabricated on InP substrate using an inductively coupled plasma etching process, show propagation losses of 40dB/mm with one missing row and of less than 10 dB/mm with three missing rows.","PeriodicalId":265561,"journal":{"name":"OFC/NFOEC Technical Digest. Optical Fiber Communication Conference, 2005.","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"OFC/NFOEC Technical Digest. Optical Fiber Communication Conference, 2005.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OFC.2005.192520","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Photonic crystal waveguides, fabricated on InP substrate using an inductively coupled plasma etching process, show propagation losses of 40dB/mm with one missing row and of less than 10 dB/mm with three missing rows.