{"title":"Silicon RFIC UWB bandpass filter using bulk-micromachined trench couplers","authors":"Xuguo Huang, S. Lucyszyn","doi":"10.1109/IEEE-IWS.2013.6616768","DOIUrl":null,"url":null,"abstract":"A low loss silicon RFIC UWB bandpass filter is reported. The filter exploits a novel metalized coupled trench structure, fabricated by advanced silicon bulk micromachining. The couplers can achieve more than -2 dB coupling, with good even-odd mode phase velocity balance, while having practical dimensions. The CPW filter is designed using well-known interdigital filter design equations. The measured fractional bandwidth is 115%, with only 1 dB mid-band insertion loss at 6.4 GHz and better than -11 dB return loss across the whole passband. The measured differential-phase group delay is less than 200 ps from 2.6 to 10.1 GHz. Being a monolithic filter, it has a compact area of only 3.5 × 5.5 mm2.","PeriodicalId":344851,"journal":{"name":"2013 IEEE International Wireless Symposium (IWS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-04-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"8","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 IEEE International Wireless Symposium (IWS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEEE-IWS.2013.6616768","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 8
Abstract
A low loss silicon RFIC UWB bandpass filter is reported. The filter exploits a novel metalized coupled trench structure, fabricated by advanced silicon bulk micromachining. The couplers can achieve more than -2 dB coupling, with good even-odd mode phase velocity balance, while having practical dimensions. The CPW filter is designed using well-known interdigital filter design equations. The measured fractional bandwidth is 115%, with only 1 dB mid-band insertion loss at 6.4 GHz and better than -11 dB return loss across the whole passband. The measured differential-phase group delay is less than 200 ps from 2.6 to 10.1 GHz. Being a monolithic filter, it has a compact area of only 3.5 × 5.5 mm2.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
