M. Ramiączek-Krasowska, A. Szyszka, R. Paszkiewicz, J. Lukes
{"title":"Application nanoindenter as nanolithography tool","authors":"M. Ramiączek-Krasowska, A. Szyszka, R. Paszkiewicz, J. Lukes","doi":"10.1109/STYSW.2011.6155847","DOIUrl":null,"url":null,"abstract":"In the paper the results of nanoscratching of gold metal layer deposited on resist made with application of a nanoindenter are presented. Also in the paper the properties of nanoscratching as nanotool are presented. The authors showed what problems exists in application of nanoindenters as systems used for nanoscratching lithography.","PeriodicalId":261643,"journal":{"name":"2011 International Students and Young Scientists Workshop \"Photonics and Microsystems\"","volume":"310 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 International Students and Young Scientists Workshop \"Photonics and Microsystems\"","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/STYSW.2011.6155847","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In the paper the results of nanoscratching of gold metal layer deposited on resist made with application of a nanoindenter are presented. Also in the paper the properties of nanoscratching as nanotool are presented. The authors showed what problems exists in application of nanoindenters as systems used for nanoscratching lithography.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
