{"title":"Evaluation of a novel reflector in a surface acoustic wave motor","authors":"Deqing Kong, M. Kurosawa","doi":"10.1109/ULTSYM.2014.0212","DOIUrl":null,"url":null,"abstract":"To study the efficiency of the substrate in a surface acoustic wave motor, a novel interdigital transducer reflector will be designed in this research. Then, to evaluate the performance of the novel stator, the stator is fabricated with the aid of the basic semiconductor planar process. At last, some measurements, including the recycle efficiency and vibration amplitude, are introduced.","PeriodicalId":153901,"journal":{"name":"2014 IEEE International Ultrasonics Symposium","volume":"61 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-10-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 IEEE International Ultrasonics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.2014.0212","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
To study the efficiency of the substrate in a surface acoustic wave motor, a novel interdigital transducer reflector will be designed in this research. Then, to evaluate the performance of the novel stator, the stator is fabricated with the aid of the basic semiconductor planar process. At last, some measurements, including the recycle efficiency and vibration amplitude, are introduced.
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