Review of Phase Shifting Interferometry

J. Wyant
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引用次数: 2

Abstract

While phase shifting interferometry (PSI) techniques are not new, they date back at least to the 1950's1 and 1960's2, there is currently much interest in the use of PSI techniques for interferometric optical testing. This interest is at least partly due to the availability of both one-dimensional and two-dimensional solid state detector arrays and microprocessors.
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相移干涉测量技术综述
虽然相移干涉(PSI)技术并不新鲜,但它们至少可以追溯到20世纪50年代1和60年代2,目前人们对使用PSI技术进行干涉光学测试很感兴趣。这种兴趣至少部分是由于一维和二维固体探测器阵列和微处理器的可用性。
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