Xia Chen, M. Milosevic, A. Khokhar, D. Thomson, G. Reed
{"title":"Optical Waveguides by Germanium Ion Implantation on Silicon-On-Insulator Platform","authors":"Xia Chen, M. Milosevic, A. Khokhar, D. Thomson, G. Reed","doi":"10.1364/CLEOPR.2018.TH3C.3","DOIUrl":null,"url":null,"abstract":"We demonstrated a new type of integrated photonic waveguides formed by Ge ion implantation in the silicon slab on silicon-on-insulator platform. They were successfully fabricated and characterised, and can be potentially erased by laser annealing.","PeriodicalId":184212,"journal":{"name":"2018 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR)","volume":"356 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-07-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/CLEOPR.2018.TH3C.3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
We demonstrated a new type of integrated photonic waveguides formed by Ge ion implantation in the silicon slab on silicon-on-insulator platform. They were successfully fabricated and characterised, and can be potentially erased by laser annealing.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
