{"title":"A novel design of micro-scale 3D helix inductor for terahertz applications","authors":"Yingying Fan, Zhongyu Li, Xiaoyu Wang, Xusheng Tang","doi":"10.1109/ICAM.2016.7813582","DOIUrl":null,"url":null,"abstract":"This paper proposes the design and analysis of a novel micro-scale three dimensional (3D) helix inductor based on focused ion beam (FIB) technology, which is used for terahertz applications. The structure of the inductor includes two parts: the metallic helix and the coplanar waveguide (CPW). It has extremely small scale and can be integrated with other parts of on-chip circuits easily. In addition, fabricating such 3D helix inductors with high precision is much more convenient than other traditional planar spiral inductors. Good performance of quality factor and inductance value have been observed from the simulation results using High Frequency Structure Simulator (HFSS).","PeriodicalId":179100,"journal":{"name":"2016 International Conference on Integrated Circuits and Microsystems (ICICM)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 International Conference on Integrated Circuits and Microsystems (ICICM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICAM.2016.7813582","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper proposes the design and analysis of a novel micro-scale three dimensional (3D) helix inductor based on focused ion beam (FIB) technology, which is used for terahertz applications. The structure of the inductor includes two parts: the metallic helix and the coplanar waveguide (CPW). It has extremely small scale and can be integrated with other parts of on-chip circuits easily. In addition, fabricating such 3D helix inductors with high precision is much more convenient than other traditional planar spiral inductors. Good performance of quality factor and inductance value have been observed from the simulation results using High Frequency Structure Simulator (HFSS).
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
