Design of three-axis servo system based on linear motor

Abstract

Linear motor has much superior performance that rotary motor does not have. The tracking speed and control accuracy of the system can be improved greatly by the use of linear motor. The linear motor which is used as transmission mechanism in high-speed precision laser sub-marker is introduced in this paper. The system has a series of merits such as fast dynamic response, high transmission stiffness, great feed speed and acceleration, accurate position, unlimited stroke length and small vibration and noise. Also some problems about the application of linear motor in servo feed system are mentioned. Finally, the realization of interpolation algorithm - Digital Differential Analyzer (DDA) - which is used in the command devices of the system is introduced briefly