PENENTUAN DENSITAS PLASMA HIDROGEN NONTERMAL PADA TEKANAN RENDAH

Nelda Ipkawati, Saktioto Saktioto
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Abstract

Before producing hydrogen plasma low pressure in experiment, it is necessary to know the density equilibrium process through a simulation. Hydrogen species densities of non-thermal plasma at low pressure is simulated using chemical kinetik model by Runge Kutta method. This simulation carried out to determine the equilibrium process of densities and reaction rates of hydrogen species in achieving equilibrium conditions. The equation used time-dependent continuity equation and Arrhenius form. The hydrogen species consist of electrons, H, H2, H+ and H2+. The results of show that electron density, H, H2, H+ and H2+ are respectively 1020,23m-3, 1019,69m-3, 1019,91m-3, 1019,39m-3 and 1018,43m-3 during of 23-24 ns. These describe that the density of each species of hydrogen very fast to achieve equilibrium conditions, while the value of the reaction rate obtained can be concluded that the value of the largest reaction rate is the impact ionization process with a value of 9.86x1052m-3 s-1and the smallest one is dissociation process with a value of 1.22x10-5m-3 s-1.
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测定低压力的非热等离子体密度
在实验中产生氢等离子体低压之前,有必要通过模拟来了解密度平衡过程。采用Runge - Kutta方法,利用化学动力学模型模拟了低压下非热等离子体的氢种密度。为了确定在达到平衡条件下氢的密度和反应速率的平衡过程,进行了模拟。方程采用时变连续性方程和阿伦尼乌斯形式。氢由电子、H、H2、H+和H2+组成。结果表明:在23 ~ 24 ns内,H、H2、H+和H2+的电子密度分别为1020、23m-3、1019、69m-3、1019、91m-3、1019、39m-3和1018、43m-3。这些描述了每种氢的密度很快达到平衡条件,而得到的反应速率值可以得出,最大的反应速率值为冲击电离过程,其值为9.86 × 1052m-3 s-1,最小的反应速率值为解离过程,其值为1.22 × 10-5m-3 s-1。
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