WebFabIS: a Web based information system for microelectronics manufacturing

Abstract

"WebFabIS" is a new software tool realised for planning, scheduling and control of technological processes in the microelectronic clean-room of the Microsystems Research Division of ITC-Irst. R&D activity in the microelectronics and microfabrication field is concerned with continuous innovations in the fabrication processes and with new devices to be developed. For this reason, the scientific and technological know-how shared among the research team is continuously growing and so are the variables to be studied and monitored. Some of the devices are also produced in small series. All the detailed information and related instructions about the fabrication process are necessary not only to researchers who design the devices and supervise the wafer processing in the clean-room, but especially to the specialised technical staff, who need to have all the instructions from the researchers.