Test of reflective MTN liquid crystal cell for the LCOS microdisplay by guided wave method

Zhi-dong Zhang, Guili Zheng, Hui Zhang, Libin Si, W. Ye
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Abstract

In order to confirm the function of MTN model in our LCOS microdisplay device, we made the MTN test cell, in which low substrate is also glass instead of silicon. Since a standard commercial-like liquid crystal cell with low index glass( with an index close to 1.52) plate is to be investigated by a guided model technique to unravel the director profile through the cell, the low index improved fully leaky guided model(IFLGM) technique are chosen. At higher applied voltages (in our study U≥5.0 V(rms), the voltage-dependent reflectance can not be distinguished. In this range of the applied voltage, the electric fields create tiny difference in the distribution of the director only near the substrates and waveguide signals are just sensitive to this difference. Fitting the data in reflection by using the modeling-program based upon multilayer optical theory together with continuum theory gives the information about the pre-tilt and twist of the director as well as the parameters of different optical layers. We found that the pre-tilt angle on the top substrate is smaller 1° than that on the bottom in the best fit, this suggests that the ITO and the aluminum coatings have different effects on the alignment layers.
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导波法测试LCOS微显示用反射MTN液晶单元
为了验证MTN模型在LCOS微显示器件中的功能,我们制作了MTN测试单元,其中低衬底也是玻璃而不是硅。由于要用引导模型技术来研究具有低折射率玻璃(折射率接近1.52)板的标准商用液晶电池,以通过电池来揭示导流器轮廓,因此选择了低折射率改进的全泄漏引导模型(IFLGM)技术。在较高的施加电压下(在我们的研究中U≥5.0 V(rms)),不能区分电压相关的反射率。在施加电压的这个范围内,电场只在衬底附近的定向器分布中产生微小的差异,波导信号对这种差异很敏感。利用基于多层光学理论和连续介质理论的建模程序对反射数据进行拟合,得到了指向器的预倾和预扭以及不同光学层的参数信息。我们发现,在最适合的情况下,顶部基板的预倾斜角度比底部的预倾斜角度小1°,这表明ITO和铝涂层对对准层的影响不同。
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