{"title":"Optical coupler fabrication on based buried field-assisted ion-exchange method","authors":"H.R. Azarinia","doi":"10.1109/ISIE.1999.797013","DOIUrl":null,"url":null,"abstract":"A method for fabricating optical directional couplers by combining thermal and field assisted ion exchange processes is presented. Modeling, design, fabrication, and test methods are discussed. This method estimates the need for high-resolution lithography that is needed in conventional methods of computer fabrication.","PeriodicalId":227402,"journal":{"name":"ISIE '99. Proceedings of the IEEE International Symposium on Industrial Electronics (Cat. No.99TH8465)","volume":"42 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-07-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ISIE '99. Proceedings of the IEEE International Symposium on Industrial Electronics (Cat. No.99TH8465)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISIE.1999.797013","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
A method for fabricating optical directional couplers by combining thermal and field assisted ion exchange processes is presented. Modeling, design, fabrication, and test methods are discussed. This method estimates the need for high-resolution lithography that is needed in conventional methods of computer fabrication.
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