{"title":"Thermal-Free Tunable Silicon Microring Resonator Driven by High-Mobility Conducting Oxide","authors":"W. Hsu, Alan X. Wang","doi":"10.1109/GFP51802.2021.9673825","DOIUrl":null,"url":null,"abstract":"We demonstrated a thermal-free tunable silicon microring resonator using a MOS capacitor gated by high mobility titanium-doped indium oxide. A high electro-optic tuning efficiency of 130 pm/V compensates for temperature fluctuation up to 12 K with a low power consumption of 11 pW/nm.","PeriodicalId":158770,"journal":{"name":"2021 IEEE 17th International Conference on Group IV Photonics (GFP)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 IEEE 17th International Conference on Group IV Photonics (GFP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/GFP51802.2021.9673825","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We demonstrated a thermal-free tunable silicon microring resonator using a MOS capacitor gated by high mobility titanium-doped indium oxide. A high electro-optic tuning efficiency of 130 pm/V compensates for temperature fluctuation up to 12 K with a low power consumption of 11 pW/nm.