H. Kato, S. Wakui, T. Mayama, A. Toukairin, H. Takanashi, S. Adachi
{"title":"System identification of anti-vibration units in semiconductor exposure apparatus","authors":"H. Kato, S. Wakui, T. Mayama, A. Toukairin, H. Takanashi, S. Adachi","doi":"10.1109/CCA.1999.801162","DOIUrl":null,"url":null,"abstract":"System identification of semiconductor exposure apparatus is discussed. It has a multi-degrees-of-freedom mechanism which includes anti-vibration units for microvibration control. A dynamical model of the mechanism is necessary in order to design the microvibration controller. The model is practically constructed in a short time using a subspace method. Identification results are evaluated through experimental data in comparison with a conventional frequency response method.","PeriodicalId":325193,"journal":{"name":"Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CCA.1999.801162","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6
Abstract
System identification of semiconductor exposure apparatus is discussed. It has a multi-degrees-of-freedom mechanism which includes anti-vibration units for microvibration control. A dynamical model of the mechanism is necessary in order to design the microvibration controller. The model is practically constructed in a short time using a subspace method. Identification results are evaluated through experimental data in comparison with a conventional frequency response method.
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