{"title":"REACTOR SCALE SIMULATION OF ATOMIC LAYER DEPOSITION IN A MULTI-WAFER VISCOUS FLOW REACTOR","authors":"Betelhiem N. Mengesha, M. Shaeri","doi":"10.1615/tfec2022.ees.041000","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":330469,"journal":{"name":"Proceeding of 7th Thermal and Fluids Engineering Conference (TFEC)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceeding of 7th Thermal and Fluids Engineering Conference (TFEC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1615/tfec2022.ees.041000","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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