Temperature effect of vapor-phase self-assembled monolayer for anti-sticking layers used in UV-embossing

Nan Liu, Lining Sun, Peng Jin, Jie Lin, Jiubin Tan
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Abstract

An optimizing method of vapor-phase depositing anti-adherence layer in UV-embossing through controlling temperature is proposed to enhance the quality of demolding process. Experimental results show that, under low deposited temperature, the quality of anti-adherence layer is better than that under high temperature. Under low temperature, the contact angle of water, methylene iodide, and formamide is 119°, 101°, and 105°, and surface free energy is 8.5mJ/m2, which is similar to its ideal value. Film thickness is equal to its molecule length. XPS experiments mean that monolayer under low temperature is more orderly than that under high temperature. And crack character of low temperature is also better than that of high temperature.
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uv压花防粘层气相自组装单层的温度效应
为了提高脱模质量,提出了一种通过控制温度来优化气相沉积防粘层的方法。实验结果表明,低温沉积条件下的抗粘附层质量优于高温沉积条件下的抗粘附层。在低温下,水、碘化亚甲基和甲酰胺的接触角分别为119°、101°和105°,表面自由能为8.5mJ/m2,接近其理想值。膜的厚度等于它的分子长度。XPS实验表明,低温下的单分子层比高温下的单分子层更有序。低温下的裂纹特性也比高温下的好。
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