Micro-Scale Acoustic Streaming Pump Performance Characteristics

Abstract

Acoustic streaming theory, applied to micro-scale pumps is presented. A mathematical model based on streaming equations and Mason’s model [9] of the piezoelectric transducer is described. Using this model, the effect of geometric scaling, frequency variation, and excitation amplitude on head and flow rate are examined. The significance of high body forces in the AC boundary layer are demonstrated, along with their effect on mass flow rates for small geometries. It is shown that flow velocities are inversely proportional to the flow tube diameter for small sizes. Experimental data for a macro-scale pump is provided and used to corroborate the static head versus excitation relationship predicted by the model. Compression wave acoustic streaming pumps are shown to have potential viability for micro-scale applications.