{"title":"Environmental Awareness In Semiconductor Manufacturing","authors":"Y. Ishii","doi":"10.1109/ISSM.1994.729414","DOIUrl":null,"url":null,"abstract":"World current for sustainable development is requiring environmentally sound production processes and products. Semi-conductor industry is high tech one. However, it consumes larger amount of resources than other industries. It is hoped that the semi-conductor industries will consider this point and make efforts to improve it in the same competitive way as their products performances.","PeriodicalId":114928,"journal":{"name":"International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM","volume":"2009 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM.1994.729414","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
World current for sustainable development is requiring environmentally sound production processes and products. Semi-conductor industry is high tech one. However, it consumes larger amount of resources than other industries. It is hoped that the semi-conductor industries will consider this point and make efforts to improve it in the same competitive way as their products performances.
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