A. Sebastian, M. Salapaka, D.J. Chen, J. Cleveland
{"title":"Harmonic analysis based modeling of tapping-mode AFM","authors":"A. Sebastian, M. Salapaka, D.J. Chen, J. Cleveland","doi":"10.1109/ACC.1999.782775","DOIUrl":null,"url":null,"abstract":"In this paper we use harmonic balance and averaging techniques to analyze the tapping mode dynamics of the atomic force microscope (AFM). A model for the cantilever sample interaction is developed. Experimental results show that the analysis and the model predict the behavior of the tapping cantilever.","PeriodicalId":441363,"journal":{"name":"Proceedings of the 1999 American Control Conference (Cat. No. 99CH36251)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"48","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 1999 American Control Conference (Cat. No. 99CH36251)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ACC.1999.782775","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 48
Abstract
In this paper we use harmonic balance and averaging techniques to analyze the tapping mode dynamics of the atomic force microscope (AFM). A model for the cantilever sample interaction is developed. Experimental results show that the analysis and the model predict the behavior of the tapping cantilever.
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