Research on Full Bridge Converter of Magnetron Sputtering Power Supply

Abstract

Phase-shifted full bridge(PSFB) topology was used in the main circuit of high-power magnetron sputtering power supply (MSPS), which greatly improves power efficiency by means of soft-switching. The traditional topology has the problems of difficult to realize soft-switching of lag arm, the loss of duty cycle and the large circulation loss. In this paper, the PSFB converter with auxiliary transformer was used as the main circuit topology. The working principle and mode of the converter was analyzed in detail, and the realization of soft switching and circulating current loss with wide load range were studied. An experimental prototype with 1.1kW/220V and 20kHz switching frequency was built based on the basis of theoretical analysis, The experimental results had verified that the PSFB converter with auxiliary transformer has improved the efficiency and reliability of switching power supply, and this topology is effective in improving the performance of the main circuit of the MSPS.