System for multi-frequency capacitance-voltage characterization

Abstract

Capacitance measurement at different DC voltage levels, different signal amplitudes and different frequencies, finds extensive application to qualify semiconductor and multiple-layered structures. Generally, the cost of such type instrumentation is in range of several thousand dollars and they are not very popular in the market. In present paper an approach of combining conventional measuring instruments and high-level programming environment is suggested in order to achieve system with complete functionalities for capacitance measurements.