Comparisons of instability in device characteristics at high temperature for thin-film SOI power n- and p- channel MOSFETs

M. Kaneda, Kazumasa Ariyoshi, S. Matsumoto
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引用次数: 1

Abstract

This paper investigate instability in device characteristics related to the hot carrier effect, Negative Bias Temperature Instability (NBTI) and Positive Bias Temperature (PBTI) under DC stress for n- and p-channel thin-film Silicon on Insulator (SOI) power MOSFET at high temperature. The threshold voltage shift increases as the temperature rises due to PBTI for n-MOSFET and NBTI for p-MOSFET. Drain Avalanche Hot Carrier (DAHC) occurs when the gate stress voltage is near the threshold voltage and Channel Hot Carrier (CHC) occurs when the gate voltage is high. The threshold voltage shift and the degradation rate of on-resistance of the n-MOSFET is larger than that of the p-MOSFET due to the difference in the impact ionization coefficient between electrons and holes.
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薄膜SOI功率n沟道和p沟道mosfet在高温下器件特性不稳定性的比较
本文研究了高温下n沟道和p沟道薄膜绝缘体上硅(SOI)功率MOSFET器件特性的不稳定性与热载子效应、负偏置温度不稳定性(NBTI)和正偏置温度(PBTI)有关。由于n-MOSFET的PBTI和p-MOSFET的NBTI,阈值电压漂移随着温度的升高而增加。栅极应力电压接近阈值电压时发生漏极雪崩热载流子(DAHC),栅极电压过高时发生通道热载流子(CHC)。由于电子与空穴之间的冲击电离系数不同,n-MOSFET的阈值电压位移和导通电阻退化率大于p-MOSFET。
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