G. Wiche, J. Goettert, Yujun Song, J. Hormes, C. Kumar
{"title":"Functional Micro Devices Using 'Nanoparticle-Photoresist' Composites","authors":"G. Wiche, J. Goettert, Yujun Song, J. Hormes, C. Kumar","doi":"10.1142/S1465876303001678","DOIUrl":null,"url":null,"abstract":"We have developed two fabrication routes for functional micro devices using SU-8/nanoparticle composites. In the first route, patterning of a 0.5% nanoparticle/SU-8 composite resulted in magnetic and luminescent polymeric microstructures. In the second route, a 42% nanoparticle/SU-8 composite was patterned followed by sintering to obtain free standing ceramic microstructures with aspect ratios as high as 16.","PeriodicalId":331001,"journal":{"name":"Int. J. Comput. Eng. Sci.","volume":"17 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Int. J. Comput. Eng. Sci.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1142/S1465876303001678","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
We have developed two fabrication routes for functional micro devices using SU-8/nanoparticle composites. In the first route, patterning of a 0.5% nanoparticle/SU-8 composite resulted in magnetic and luminescent polymeric microstructures. In the second route, a 42% nanoparticle/SU-8 composite was patterned followed by sintering to obtain free standing ceramic microstructures with aspect ratios as high as 16.
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