R. Laishram, Sunil Kumar, S. Dayal, R. Chaubey, R. Raman, B. K. Sehgal
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引用次数: 4
Abstract
The changes in dc characteristics of AlGaN/GaN HEMT after ICP-CVD silicon nitride (SiNx) passivation using two different recipes were investigated. Room temperature Raman analysis was performed to determine the stress state of the AlGaN layer after SiNx passivation. The changes in the stress state of the device after passivation was correlated with the shift in threshold voltage and changes in drain current. DC measurement was used as a quick method to assess the drain current collapse. The degree of current collapse in the samples passivated with two different recipes is discussed in the light of the results, and hypothesis and explanations reported in the literature.
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