Y. Matsumoto, Naoki Nishioka, A. Koizumi, Akito Uemura, Ryosuke Nakamura, M. Yoshimura, H. Horibe, T. Kamimura
{"title":"High-speed imaging of photoresist stripping phenomena induced by laser irradiation without causing the laser damage","authors":"Y. Matsumoto, Naoki Nishioka, A. Koizumi, Akito Uemura, Ryosuke Nakamura, M. Yoshimura, H. Horibe, T. Kamimura","doi":"10.1117/12.2598555","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":297423,"journal":{"name":"Laser-Induced Damage in Optical Materials 2021","volume":"79 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-10-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Laser-Induced Damage in Optical Materials 2021","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2598555","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}