P. Paillet, V. Ferlet-Cavrois, J. Schwank, D. Fleetwood
{"title":"Response of SIMOX and Unibond buried oxides: trapping and detrapping properties","authors":"P. Paillet, V. Ferlet-Cavrois, J. Schwank, D. Fleetwood","doi":"10.1109/RADECS.1999.858603","DOIUrl":null,"url":null,"abstract":"X-ray induced charge trapping and detrapping properties are investigated in SIMOX and Unibond(R) buried oxides. A very deep trapping of both holes and electrons is evidenced in these materials. The importance of electron compensation, both during irradiation and anneal, is shown to determine the anneal properties.","PeriodicalId":135784,"journal":{"name":"1999 Fifth European Conference on Radiation and Its Effects on Components and Systems. RADECS 99 (Cat. No.99TH8471)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"1999 Fifth European Conference on Radiation and Its Effects on Components and Systems. RADECS 99 (Cat. No.99TH8471)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/RADECS.1999.858603","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
X-ray induced charge trapping and detrapping properties are investigated in SIMOX and Unibond(R) buried oxides. A very deep trapping of both holes and electrons is evidenced in these materials. The importance of electron compensation, both during irradiation and anneal, is shown to determine the anneal properties.
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