Chromatic confocal sensor with dual dispersion for extending the measuring range

Xiaojie Wang, Tao Ma
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Abstract

A dual dispersion stitching method is proposed to extend the measuring range of chromatic confocal sensor without reducing the axial resolution. A novel chromatic confocal sensor with dual dispersion is presented and introduced. An X-shaped fiber coupler is employed to divide the light from light source into two beams. These two beams are used to generate two sets of staggered dispersion which extend the measuring range of chromatic confocal sensor. A dual-dispersive objective is designed with Zemax software for verifying the proposed method. The result indicates that the length of total dispersion is extended to 209.6 μm, which is 1.75 times the length of single dispersion. The coefficient of determination between the axial dispersion and wavelength is close to 1.0000.
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具有双色散的彩色共焦传感器,可扩展测量范围
为了在不降低轴向分辨率的前提下扩大彩色共焦传感器的测量范围,提出了一种双色散拼接方法。介绍了一种新型的双色散彩色共焦传感器。采用x形光纤耦合器将光源发出的光分成两束。利用这两束光产生两组交错色散,扩大了彩色共聚焦传感器的测量范围。利用Zemax软件设计了双色散物镜,验证了所提出的方法。结果表明,总色散长度达到209.6 μm,是单色散长度的1.75倍。轴向色散与波长的决定系数接近1.0000。
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