Application specific electrode-integrated nanotube cathodes (ASINCs) for miniature analytical instruments for space exploration

H. Manohara, M. Bronikowski, R. Toda, E. Urgiles, R. Lin, K. Yee, A. Kaul, John Hong
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引用次数: 8

Abstract

JPL has developed high performance cold cathodes using arrays of carbon nanotube bundles that routinely produce > 15 A/cm2 at applied fields of 5 to 8 V/μm without any beam focusing. They have exhibited robust operation in poor vacuums of 10-6 to 10-4 Torr- a typically achievable range inside hermetically sealed microcavities. A new double-SOI process to monolithically integrate gate and additional beam tailoring electrodes has been developed. These electrodes are designed according to application requirements making carbon nanotube field emission sources application specific (Application Specific electrode-Integrated Nanotube Cathodes or ASINCs). ASINCs, vacuum packaged using COTS parts and a reflow bonding process, when tested after 6-month shelf life have shown little emission degradation. Lifetime of ASINCs is found to be affected by two effects- a gradual decay of emission due to anode sputtering, and dislodging of CNT bundles at high fields (> 10 V/μm). Using ASINCs miniature X-ray tubes and mass ionizers have been developed for future XRD/XRF and miniature mass spectrometer instruments for lander missions to Venus, Mars, Titan, and other planetary bodies.
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空间探索微型分析仪器专用电极集成纳米管阴极(ASINCs
JPL开发了高性能冷阴极,使用碳纳米管束阵列,在5至8 V/μm的应用磁场下,通常产生> 15 A/cm2,没有任何光束聚焦。它们在10-6到10-4托的差真空中表现出了强大的操作-这是在密封微腔内通常可以实现的范围。提出了一种单片集成栅极和附加束裁剪电极的双soi工艺。这些电极是根据应用需求设计的,使碳纳米管场发射源具有应用特异性(应用特异性电极集成纳米管阴极或ASINCs)。使用COTS部件和回流焊工艺真空封装的asic,在6个月的保质期后进行测试时,几乎没有显示出排放降低。研究发现,碳纳米管的寿命受两个因素的影响:阳极溅射导致的发射逐渐衰减,以及在高场(> 10 V/μm)下碳纳米管束的位移。使用ASINCs的微型x射线管和质量电离器已开发用于未来的XRD/XRF和微型质谱仪仪器,用于金星,火星,土卫六和其他行星体的着陆器任务。
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