Different channel-spacing DFB laser array fabricated by SAG after optimization

Can Zhang, Li Ma, S. Liang, Baojun Wang, Hongliang Zhu, Wei Wang
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Abstract

Selective area growth has been performed to fabricate monolithically integrated DFB laser array with different channel spacings by adjusting the mask width and the thickness of waveguide layer. The DFB laser array with an average channel spacing 0.69nm and 1.50nm is demonstrated respectively.
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优化后的SAG制备不同通道间距的DFB激光阵列
通过调整掩模宽度和波导层厚度,实现了不同通道间距单片集成DFB激光阵列的选择性面积生长。制备了平均通道间距分别为0.69nm和1.50nm的DFB激光阵列。
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