Analysis of the electrical characteristics of novel ESD protection device with high holding voltage under various temperatures

Yong-Seo Koo, Hyun Duck Lee, J. Won, Yil Suk Yang
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引用次数: 8

Abstract

The paper introduces a silicon controlled rectifier (SCR)-based device with high holding voltage for ESD power clamp. The holding voltage can be increased by extending a p+ cathode to the first n-well and adding second n-well wrapping around n+ cathode. The increase of the holding voltage above the supply voltage enables latch-up immune normal operation. The device is fabricated by 0.35um BCD (Bipolar-CMOS-DMOS) technology and investigated not only the electrical characteristics, but also temperature dependence of holding voltage/current in a wide temperature range from 300K to 500K. In the measurement result, the proposed device has holding voltage of 8V and second breakdown current of 80mA/um. At high temperature condition of above 400K, the holding voltage, holding current and second breakdown current of the proposed device rapidly decrease.
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新型高保持电压ESD保护器件在不同温度下的电气特性分析
介绍了一种基于可控硅的高保持电压ESD电源箝位器件。通过将p+阴极延伸到第一个n-阱,并在n+阴极周围添加第二个n-阱,可以提高保持电压。保持电压高于电源电压使锁存免疫正常工作。该器件采用0.35um双极cmos - dmos技术制备,不仅研究了其电学特性,还研究了在300K至500K宽温度范围内保持电压/电流的温度依赖性。测量结果表明,该器件保持电压为8V,二次击穿电流为80mA/um。在400K以上的高温条件下,器件的保持电压、保持电流和二次击穿电流迅速降低。
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