{"title":"Liquid crystal spatial light modulators in optical metrology","authors":"C. Falldorf, C. von Kopylow, R. Bergmann","doi":"10.1109/WIO.2010.5582527","DOIUrl":null,"url":null,"abstract":"We provide an overview over recent applications of electronically adressed liquid crystal spatial light modulators (SLM) in the field of optical metrology. Three particular examples are considered: A shear interferometer, a setup for phase retrieval from a set of intensity measurements and a digital holographic sensor which allows for the electronic adaption of the reference wave.","PeriodicalId":201478,"journal":{"name":"2010 9th Euro-American Workshop on Information Optics","volume":"42 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-07-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"12","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 9th Euro-American Workshop on Information Optics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/WIO.2010.5582527","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 12
Abstract
We provide an overview over recent applications of electronically adressed liquid crystal spatial light modulators (SLM) in the field of optical metrology. Three particular examples are considered: A shear interferometer, a setup for phase retrieval from a set of intensity measurements and a digital holographic sensor which allows for the electronic adaption of the reference wave.
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