The capacitive sensor

Abstract

This paper is focused on a cavity in LTCC (Low Temperature Co-fired Ceramics), which is one of the methods used for creation of pressure sensor. The mechanical part is 3D structure in which there are integrated electrodes created by TFT (Thick Film Technology). One of them is fixed and the other one is on the deformation element. The zero value is defined by the size of the cavity. The sensor is constructive as a plate capacitor with a change in the distance of electrodes. The change of pressure is caused by the deformation and which consequently changes the capacitive. The quality of the sensor is influence by quality of the cavity. There are many problems with a deformation defect of the actuating element. The main aim is to create a cavity with a regular shape. It is very important for the solidity and good of sensitivity of the pressure sensor.