{"title":"Universal dielectric for creation of miniature UHF electronic devices anodic alumina","authors":"N. Mukhurov","doi":"10.1109/UHF.1999.787950","DOIUrl":null,"url":null,"abstract":"The unique aluminum oxide technology and its product-anodic alumina (AA) substrates both with and without aluminum base-hold much promise for semiconductor and vacuum microelectronics applications. The basis for successful applications of AA as a ceramic dielectric in UHF electronics is their unique electrophysical properties, which are presented in this paper.","PeriodicalId":348319,"journal":{"name":"Proceedings International University Conference 'Electronics and Radiophysics of Ultra-High Frequencies' (Cat. No.99EX356)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-05-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings International University Conference 'Electronics and Radiophysics of Ultra-High Frequencies' (Cat. No.99EX356)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/UHF.1999.787950","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The unique aluminum oxide technology and its product-anodic alumina (AA) substrates both with and without aluminum base-hold much promise for semiconductor and vacuum microelectronics applications. The basis for successful applications of AA as a ceramic dielectric in UHF electronics is their unique electrophysical properties, which are presented in this paper.
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