Buried planar and channel waveguides in sapphire and Ti:sapphire by proton implantation

L. Laversenne, P. Hoffmann, M. Pollnau, P. Moretti
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Abstract

Buried, stacked planar and channel waveguides in sapphire and Ti:sapphire are fabricated by proton implantation. Flexibility of the fabrication technique and good control over the implantation parameters result in variable design and excellent light confinement.
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质子注入蓝宝石和钛蓝宝石中埋藏平面波导和沟道波导
采用质子注入的方法制备了蓝宝石和钛蓝宝石中埋置、堆叠的平面波导和通道波导。制造工艺的灵活性和对注入参数的良好控制导致了可变设计和良好的光约束。
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