Finite Element Modelling of a Piezoelectric Accelerometer for Apparent Acceleration Measurement

Abstract

In this paper, a design concept of a microscale piezo accelerometer capable of measuring nearly constant signals is proposed. Taking the advantages of both MEMS and piezo devices it provides brilliant opportunities for the development of inertial grade navigation systems. By utilizing the novel excitation method the sensors working point is pushed to the area of higher frequencies which provides a great increase in the sensors bandwidth. A finite element modelling was performed to prove the concept, find optimal design and its potential sensitivity characteristics. In case of a 2 cm length needle-like sensing element it provides the sensitivity about 36 mV/g with a perfect linearity and low cross-sensitivity.