Accurate closed-form expressions for the frequency-dependent line parameters of coupled on-chip interconnects on silicon substrate

Abstract

Accurate closed-form expressions for the frequency-dependent [R], [L], [G], [C] line parameters of coupled on-chip interconnects on lossy silicon substrate are presented. The closed-form expressions for the frequency-dependent series impedance parameters are obtained using a complex image method. The frequency-dependent shunt admittance parameters are expressed using high- and low-frequency asymptotic static solutions. The proposed closed-from expressions are shown to be in good agreement with both quasi-static and full-wave electromagnetic solutions.