A. Shanker, A. Wojdyla, G. Gunjala, Jonathan Dong, M. Benk, A. Neureuther, K. Goldberg, L. Waller
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引用次数: 2
Abstract
Surface roughness on a flat object causes natural speckle when imaged by an extreme ultraviolet (EUV) microscope under sufficient coherence. Using a phase-to-intensity transfer function theory, direct estimation of aberrations from the spectrum of the speckle intensity is demonstrated for various illumination angles.
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