A New Modeling Method Of Vertical Electrostatic Comb Drive

Abstract

In this paper, we have successfully modeling a vertical motion electrostaitc comb drive and proof it's efficiency by using existed experimental data. A commercial 3-D MEMS Simulator was employed to stimulate the static levitation of vertical comb drive. Note that, by gradually increasing the dc bias voltage, each simulation process is either converged slowly or even enters the divergence stage. Hence, the 3-D simulator is degraded in simulating vertical electrostatic comb drive in full input range. In the present modelling method, Maxwell 2-D solver was employed to calculate the comb finger capacitance at different z positions firstly. Second, A 6th-order curve fitting was used to extract the capacitance function, C(z), and the unit electrostastic force function, dC/dz, was obtained by taking derivative of capacitance function. Finally, a dynamic system model block diagram was established in Matlab Simulink program environment. A set of ideal geometry parameter was selected to verify the accuracy of our m...