Microwave Plasma Discharge Produced And Sustained By The Surface Wave Propagating Along A Metal Wire

N. Azarenkov, I. Denisenko, K. Ostrikov
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Abstract

A theoretical model of the plasma discharge in a metal cylinder pumped by an operating gas of an arbitrary nature is presented. The ionization is carried out by the surface wave (SW) propagating along a coaxial metal wire. The model includes the local dispersion relation, the energy balance equation, and the relation between the absorbed power per unit length and the local plasma density. Two typical regimes of the discharge are analyzed. In both regimes the axial and radial profiles of the plasma density of the electromagnetic field components and of the SW intensity are obtained. The possible use of the obtained results in plasma technology are discussed.
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表面波沿金属导线传播所产生并维持的微波等离子体放电
提出了一种由任意性质的工作气体泵送的金属圆筒内等离子体放电的理论模型。离子化是由沿同轴金属线传播的表面波(SW)进行的。该模型包括局部色散关系、能量平衡方程以及单位长度吸收功率与局部等离子体密度的关系。分析了两种典型的放电状态。在这两种情况下,得到了电磁场分量的等离子体密度和微波强度的轴向和径向分布。讨论了所得结果在等离子体技术中的可能应用。
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