Improving the radiation hardness properties of silicon detectors using oxygenated n-type and p-type silicon

G. Casse, P. Allport, M. Hanlon
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引用次数: 51

Abstract

The degradation of the electrical properties of silicon detectors exposed to 24 GeV/c protons were studied using pad diodes made from different silicon materials. Standard high-grade p-type and n-type substrates and oxygenated n-type substrates have been used. The diodes were studied in terms of reverse current (I/sub r/) and full depletion voltage (V/sub fd/) as a function of fluence. The oxygenated devices from different suppliers with a variety of starting materials and techniques, all show a consistent improvement of the degradation rate of V/sub fd/ and CCE compared to un-oxygenated substrate devices. Radiation damage of n-type detectors introduces stable defects acting as effective p-type doping and leads to the change of the conductivity type of the silicon bulk (type inversion) at a neutron equivalent fluence of a few 10/sup 13/ cm/sup -2/. The diode junction after inversion migrates from the original side to the back plane of the detector. The migration of the junction is avoided using silicon detectors with p-type substrate. Furthermore, the use of n-side readout allows a better charge collection in segmented devices operated in underdepleted mode. Large area (/spl ap/6.4/spl times/6.4 cm/sup 2/) 80 /spl mu/m pitch microstrip capacitively coupled detectors with polysilicon bias resistors made on p-type substrate with a n-i-p diode structure have been irradiated up to 3/spl middot/10/sup 14/ cm/sup -2/. We present results both before and after irradiation demonstrating the feasibility of using such devices at the Large Hadron Collider (LHC) at CERN.
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利用氧化n型和p型硅改善硅探测器的辐射硬度性能
用不同硅材料衬底二极管研究了24gev /c质子对硅探测器电性能的影响。已采用标准高档p型和n型衬底及氧合n型衬底。研究了二极管的反向电流(I/sub r/)和完全耗尽电压(V/sub fd/)作为通量的函数。来自不同供应商的氧化器件具有各种起始材料和技术,与未氧化的衬底器件相比,都显示出V/sub fd/和CCE降解率的一致提高。n型探测器的辐射损伤引入了作为有效p型掺杂的稳定缺陷,并导致硅体的电导率类型(型反转)在几个10/sup 13/ cm/sup -2/的中子当量通量下发生变化。反转后的二极管结从探测器的原始侧面迁移到背面。采用p型衬底的硅探测器避免了结的迁移。此外,n侧读出的使用允许在欠耗尽模式下运行的分段设备中更好地收集电荷。大面积(/spl ap/6.4/spl倍/6.4 cm/sup 2/) 80 /spl μ /m间距的带多晶硅偏置电阻的微带电容耦合探测器在p型衬底上采用n-i-p二极管结构,辐照强度可达3/spl middot/10/sup / 14/ cm/sup -2/。我们提出了辐照前后的结果,证明了在欧洲核子研究中心的大型强子对撞机(LHC)上使用这种装置的可行性。
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