Frequency selective MEMS microphone based on a bioinspired spiral-shaped acoustic resonator

Abstract

Acoustic sensors that can detect specific sounds in everyday environments are of growing interest. Our approach to enable a low-power signal recognition system is to create a frequency-selective microphone that is tuned to match a frequency of interest. We present a frequency-selective MEMS microphone achieved by utilizing spiral-shaped acoustic resonators inspired by the spiral-shaped structures found in the human ear. The resonators were fabricated by 3D-printing and easily integrated with our test circuit board. Here, we demonstrate simulation results investigating the effect of output aperture locations, and experimental results achieving a 2.7× increase in sensitivity at the 430 Hz resonance frequency.