{"title":"CIM Systems In An Advanced Semiconductor Factory","authors":"K. Shibata","doi":"10.1109/ISSM.1994.729422","DOIUrl":null,"url":null,"abstract":"The policies of CIM systems development and delivery in an advanced semiconductor factory are described, establishing a methodology for efficient production of a variety of devices. The implementation of CIM systems is expected to enhance total productivity in process and device engineering technology, wafer fabrication technology, and equipment efficiency. A dispatcher has been developed, and is presently evaluating the performance of WIP lot movements using production-line data. Production-line analysis tools are introduced and successfully utilized in quantitative analysis. A statistical fine control system (SFINCS) is developed to carry out process parameter optimization for the following lot. An expert system for fail-bit discrimination is developed. Detailed, accurate, and rapid pattern discrimination of fail-bit data is achieved.","PeriodicalId":114928,"journal":{"name":"International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM","volume":"73 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM.1994.729422","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
The policies of CIM systems development and delivery in an advanced semiconductor factory are described, establishing a methodology for efficient production of a variety of devices. The implementation of CIM systems is expected to enhance total productivity in process and device engineering technology, wafer fabrication technology, and equipment efficiency. A dispatcher has been developed, and is presently evaluating the performance of WIP lot movements using production-line data. Production-line analysis tools are introduced and successfully utilized in quantitative analysis. A statistical fine control system (SFINCS) is developed to carry out process parameter optimization for the following lot. An expert system for fail-bit discrimination is developed. Detailed, accurate, and rapid pattern discrimination of fail-bit data is achieved.
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