E. Shim, Kyungho Lee, J. Pyo, Wooseok Choi, Jungbin Yun, T. Jung, Kyungduck Lee, Seyoung Kim, Chanhee Lee, Seungki Baek, Hyuncheol Kim, Sungsoo Choi, Junseok Yang, Kyoungmok Son, Jongwon Choi, Howoo Park, Bumsuk Kim, JungChak Ahn, Duckhyun Chang
{"title":"All-Directional Dual Pixel Auto Focus Technology in CMOS Image Sensors","authors":"E. Shim, Kyungho Lee, J. Pyo, Wooseok Choi, Jungbin Yun, T. Jung, Kyungduck Lee, Seyoung Kim, Chanhee Lee, Seungki Baek, Hyuncheol Kim, Sungsoo Choi, Junseok Yang, Kyoungmok Son, Jongwon Choi, Howoo Park, Bumsuk Kim, JungChak Ahn, Duckhyun Chang","doi":"10.23919/VLSICircuits52068.2021.9492472","DOIUrl":null,"url":null,"abstract":"We developed a dual pixel with accurate and all-directional auto focus (AF) performance in CMOS image sensor (CIS). The optimized in-pixel deep trench isolation (DTI) provided accurate AF data and good image quality in the entire image area and over whole visible wavelength range. Furthermore, the horizontal-vertical (HV) dual pixel with the slanted in-pixel DTI enabled the acquisition of all-directional AF information by the conventional dual pixel readout method. These technologies were demonstrated in 1.4μm dual pixel and will be applied to the further shrunken pixels.","PeriodicalId":106356,"journal":{"name":"2021 Symposium on VLSI Circuits","volume":"84 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-06-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 Symposium on VLSI Circuits","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/VLSICircuits52068.2021.9492472","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
We developed a dual pixel with accurate and all-directional auto focus (AF) performance in CMOS image sensor (CIS). The optimized in-pixel deep trench isolation (DTI) provided accurate AF data and good image quality in the entire image area and over whole visible wavelength range. Furthermore, the horizontal-vertical (HV) dual pixel with the slanted in-pixel DTI enabled the acquisition of all-directional AF information by the conventional dual pixel readout method. These technologies were demonstrated in 1.4μm dual pixel and will be applied to the further shrunken pixels.