A novel low-cost horizontal current bipolar transistor (HCBT) with the reduced parasitics

T. Suligoj, P. Biljanovic, J. Sin, K. Wang
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引用次数: 6

Abstract

A novel horizontal current bipolar transistor (HCBT) structure, suitable for the integration with pillar-like MOSFETs, is presented. The HCBT is processed by a low-cost technology in the (111) sidewalls on the [110] wafers, with minimized volume of the extrinsic regions, resulting in reduced parasitics. The HCBT structure exhibits the highest f/sub /spl tau// (30.4 GHz) and f/sub T/BV/sub CEO/ product (127.7 GHzV) among the lateral bipolar transistors.
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一种新型低成本水平电流双极晶体管(HCBT)
提出了一种适用于与柱状mosfet集成的水平电流双极晶体管(HCBT)结构。HCBT采用低成本技术在[110]晶圆的(111)侧壁进行加工,使外源区域的体积最小化,从而减少寄生。在横向双极晶体管中,HCBT结构具有最高的f/sub /spl tau// (30.4 GHz)和f/sub T/BV/sub CEO/ product (127.7 GHz)。
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